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- 3156310-026 / ADVANCED ENERGY RF-GENERATOR PARAMOUNT 1513 + PROCEDURE MANUALOpens in a new window or tabNew – Open box$3,500.89or Best Offer+$356.63 delivery in 2-4 daysgetspares.com_sparesllc09 (969) 98.4%
- AE ADVANCED ENERGY APEX 1513 3156110-014 LAM 660-032596R014 RF GENERATOROpens in a new window or tabPre-Owned$4,000.00or Best OfferFree deliveryvisionsemi (2,052) 100%
- 03-263834-00 / RF GENERATOR INTERFACE PDP-MSSD C3SPD / NOVELLUSOpens in a new window or tabPre-Owned$1,202.03or Best Offer+$94.46 deliverygetspares.com_sparesllc09 (969) 98.4%
- RF Generator Paramount 3013 PN:660-244566-121-BOpens in a new window or tabPre-Owned$6,500.00or Best Offer+$101.02 deliveryelectricboard24 (16) 100%
- CLX2750 Comdel FB1341RB RF Generator Novellus 27-414821-00 As-IsOpens in a new window or tabParts Only$1,201.25or Best Offer+$127.52 deliveryusedeqsales (9,332) 99.3%
- 3156310-011 / RF GENERATOR, LAM 660-08884-101, PARAMOUNT 1513 13.5MHZ, 1.5KW /AEOpens in a new window or tabPre-Owned$5,500.75or Best OfferFreightgetspares.com_sparesllc09 (969) 98.4%
- Paramount 3013 AE Advanced Energy 3156330-261 RF Generator Tested WorkingOpens in a new window or tabPre-Owned$6,512.23or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- ADTEC AXR-2000III 2000W RF Plasma Generator Novellus 27-360919-00 Tested WorkingOpens in a new window or tabPre-Owned$2,509.22or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- Advanced Energy Paramount 1513 RF generator 3156310-128 BOpens in a new window or tabPre-Owned$5,000.00Buy It Now+$150.00 deliveryfrom South Korea1partforall (490) 100%
- Advanced Energy PDX 2500 RF Generator 3156012-101B Novellus 27-047499-00, 117538Opens in a new window or tabPre-Owned$3,500.00or Best Offer+$238.44 deliveryfarmoninc (2,341) 100%
- 27-028379-00/ ADVANCED ENERGY 3156024-141 PDX1400 1.4KW LF RF GENERATOR/NOVELLUSOpens in a new window or tabPre-Owned$18,021.03or Best Offer+$487.49 delivery in 2-4 daysgetspares.com_sparesllc09 (969) 98.4%
- Apex 5513 AE Advanced Energy 27-284656-00 RF Generator Novellus Dented As-IsOpens in a new window or tabParts Only$6,011.24or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- Advanced Energy 660-088884-002 3156310-020 Paramount 1513 RF GeneratorOpens in a new window or tabRefurbished$19,550.00or Best Offer+$85.59 deliverygelogistics (4,290) 99%
- ADVANCED ENERGY PARAMOUNT 3013 RF Generator Half RackOpens in a new window or tabPre-Owned$5,489.81or Best Offer+$125.00 deliverysvcheck3 (612) 100%
- 04-716801-01 / INERT CHAMBER FURNACE AND RF GENERATOR / NOVELLUSOpens in a new window or tabPre-Owned$2,500.68or Best Offer+$99.17 deliverygetspares.com_sparesllc09 (969) 98.4%
- AE Advanced Energy PARAMOUNT VHF 3060 3kW, RF Generator PN:31550160-061AOpens in a new window or tabNew – Open box$19,989.00or Best Offer+$945.00 deliveryfrom Singaporeeisale1535 (89) 100%
- Apex 1513 AE Advanced Energy 1.5kW RF Generator Water Leak Tested WorkingOpens in a new window or tabPre-Owned$3,005.20or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- Novellus Systems 03-283469-00 RF Generator Cable 60 Foot Working SurplusOpens in a new window or tabPre-Owned$762.22or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- CLX2750 Comdel FP1341RA RF Generator Novellus 27-316462-00 Dented As-IsOpens in a new window or tabParts Only$1,001.25or Best Offer+$113.96 deliveryusedeqsales (9,332) 99.3%
- Novellus Systems 03-283473-00 RF Generator Cable 60 Foot Working SurplusOpens in a new window or tabPre-Owned$762.22or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- CLX2750 Comdel FP1341RA RF Generator Module Novellus R27-414821-00 As-IsOpens in a new window or tabParts Only$1,201.25or Best Offer+$113.96 deliveryusedeqsales (9,332) 99.3%
- RF Generator Paramount 3013 PN:660-244566-121-COpens in a new window or tabPre-Owned$5,500.00or Best Offer+$100.00 deliveryteken202 (1,352) 100%
- Advanced Energy 3156310-117 Paramount 1513 RF GeneratorOpens in a new window or tabPre-Owned$7,114.10or Best Offer+$521.00 deliveryfrom South Korea88q_43 (5) 100%
- Novellus SIRF RF Generator Cable Set of 4 03-397614-01 03-397614-04 WorkingOpens in a new window or tabPre-Owned$1,011.23or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- GENESIS GHW-50A ENI GHW50A-13DF3L0-006 RF Generator MKS Novellus 27-406204-00Opens in a new window or tabPre-Owned$10,800.75Was: $18,001.2540% offor Best OfferFree deliveryusedeqsales (9,332) 99.3%
- ADTEC AXR-2000III RF Plasma Generator Novellus 27-360919-00 Tested RF Trip As-IsOpens in a new window or tabParts Only$609.22or Best Offer+$102.12 deliveryusedeqsales (9,332) 99.3%
- Novellus 38-361825-00 HF Generator RF Cable Assembly Working SpareOpens in a new window or tabPre-Owned$751.25or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- Apex 1513 AE Advanced Energy 660-032596R023 RF Generator 3156110-008 TestedOpens in a new window or tabPre-Owned$3,508.20or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- 27-372675-00 / 10240101 ADTEC AXR-2000III RF PLASMA GENERATOR / NOVELLUS ADTECOpens in a new window or tabPre-Owned$2,699.56or Best Offer+$113.26 deliverygetspares.com_sparesllc09 (969) 98.4%
- Advanced Energy E-wave RF Generator 3152603-005 Novellus 27-260607-00NOpens in a new window or tabPre-Owned$7,000.00or Best Offer+$900.00 deliveryfrom Irelandrtxparts (54) 100%
- AE RF Generator Paramount VHF 6060 57-63MHz PN:660-189197R001 Used AS-ISOpens in a new window or tabPre-Owned$16,439.00or Best Offer+$500.00 deliveryfrom Chinasemiconductorvacuum (8) 100%
- MKS RF Generator Edge 1513A 1.5KW 13.56Mhz PN:EDGE 1513A-17045 AS-ISOpens in a new window or tabPre-Owned$5,989.00or Best Offer+$500.00 deliveryfrom Chinasemiconductorvacuum (8) 100%
- AE Apex1513 0920-00127-000 RF GeneratorOpens in a new window or tabPre-Owned$1,699.99Buy It NowFree deliveryfrom South Koreaod221210 (110) 100%
- Apex 1513 AE Advanced Energy A3L3L000CA140D111A RF Generator Tested WorkingOpens in a new window or tabPre-Owned$3,506.22or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- Apex 1513 AE Advanced Energy 3156110-715 RF Generator Working SurplusOpens in a new window or tabPre-Owned$3,504.25or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- ADVANCED ENERGY AE PARAMOUNT RF 1513 3156300-100 A RF PLASMA GENERATOROpens in a new window or tabPre-Owned$12,220.00Was: $13,000.006% offor Best Offer+$249.00 deliveryfrom Israelgefen-tech (220) 100%
- Advanced Energy E-wave RF Generator 3152603-011 B Novellus 27-255798-00Opens in a new window or tabPre-Owned$5,411.68or Best Offer+$260.90 deliveryfrom Germanyangr-8424 (236) 98.8%
- Apex 1513 AE Advanced Energy 660-063435-003 D RF Generator 3156110-016 TestedOpens in a new window or tabPre-Owned$3,509.20or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- FP6802R5 / RF GENERATOR CX-10K DC 16P LF LOW FREQUENCY / COMDELOpens in a new window or tabPre-Owned$5,950.03or Best OfferFreightgetspares.com_sparesllc09 (969) 98.4%
- OEM-25N-01 / OEM-25 XL, HIGH FREQUENCY RF GENERATOR, NOVELLUS 27-00157-00 / ENIOpens in a new window or tabPre-Owned$5,708.03or Best OfferFreightgetspares.com_sparesllc09 (969) 98.4%
- APEX1513 RF GENERATOROpens in a new window or tabPre-Owned$2,990.00Buy It Now+$215.13 deliveryfrom France2 watchers40-30sourcing (1,028) 100%
- Novellus Systems 03-283472-00 RF Generator Cable 60 Foot Working SurplusOpens in a new window or tabPre-Owned$762.22or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- NOVELLUS 1077642-71 RF GENERATOR CABLE, 176755Opens in a new window or tabNew – Open box$200.00or Best Offer+$30.34 deliveryfarmoninc (2,341) 100%
- Apex 1513 AE Advanced Energy 3156111-207 1.5kW RF Generator AMAT Tested WorkingOpens in a new window or tabPre-Owned$3,501.23or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- ADTEC Plasma Technology AX-2000EUII-N RF Generator Novellus 27-286651-00 TestedOpens in a new window or tabPre-Owned$1,508.22or Best Offer+$450.00 deliveryusedeqsales (9,332) 99.3%
- AE Advanced Energy Paramount VHF 7040 7kW, RF Generator 40.63 MHz 620V FOR PARTSOpens in a new window or tabParts Only$9,000.00or Best OfferFreightpotential-electronics (6,757) 99.4%
- Apex 1513 AE Advanced Energy 3156111-207 RF Generator AMAT Tested Working As-IsOpens in a new window or tabPre-Owned$1,506.24or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- Advanced Energy Paramount 1513 RF generator 3156310-117Opens in a new window or tabPre-Owned$6,000.00Buy It Now+$200.00 deliveryfrom South Korea1partforall (490) 100%
- Novellus Systems 03-042616-01 RF Generator Cable SPEED-S RG217 Working SurplusOpens in a new window or tabPre-Owned$265.34Was: $408.2135% offor Best OfferFree deliveryusedeqsales (9,332) 99.3%
- Novellus Systems 03-283468-00 RF Generator Cable 60 Foot Working SurplusOpens in a new window or tabPre-Owned$762.22or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- ADVANCED ENERGY P/N: APEX 1513 RF GENERATOROpens in a new window or tabPre-Owned$2,400.00or Best Offer+$98.07 deliveryFree returnscsi.usa (4,178) 94.3%
- LAM 660-088884-002 ADVANCED ENERGY PARAMOUNT 1513 RF GENERATOROpens in a new window or tabBrand New$23,400.00Buy It Now+$1,512.00 deliveryfrom Taiwanhommertech (8) 100%
- Novellus Systems 03-00290-03 LF RF Generator Cable CA 102-3 Working SurplusOpens in a new window or tabPre-Owned$492.84Was: $758.2135% offor Best OfferFree deliveryusedeqsales (9,332) 99.3%
- Novellus AE 14889-02 LF Generator RF Cable TMS 68999 30M 98ft Working SurplusOpens in a new window or tabPre-Owned$711.23or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- AE APEX 1513 RF Generator, 660-032596-214 3156110-214 AS-IS USEDOpens in a new window or tabPre-Owned$3,499.00or Best Offer+$500.00 deliveryfrom ChinaLast one1 watcherssemiconductorvacuum (8) 100%
- Advanced Energy PDXII 3000 RF Generator 3150311-002 Novellus R 27-409833-00 AEOpens in a new window or tabPre-Owned$13,500.00or Best Offer+$158.84 deliverymtnsemi (833) 100%
- Apex 1513 AE Advanced Energy 660-063437-003 E RF Generator 3156113-024 TestedOpens in a new window or tabPre-Owned$3,505.20or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- NOVELLUS 03-00313-04 LF RF GENERATOR CABLE, CA102-4, 156873Opens in a new window or tabPre-Owned$795.00or Best Offer+$58.24 deliveryfarmoninc (2,341) 100%
- Novellus Systems 03-283470-00 RF Generator Cable 60 Foot Working SurplusOpens in a new window or tabPre-Owned$762.22or Best OfferFree deliveryusedeqsales (9,332) 99.3%
- AE Advanced Energy 660-078399-205-C RF Generator Paramount 3013 Tested WorkingOpens in a new window or tabPre-Owned$6,726.74Was: $11,211.2440% offor Best OfferFree deliveryusedeqsales (9,332) 99.3%
