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- 02-169181-00 LAM RF SOURCE, 27-286643-00 / NOVELLUSOpens in a new window or tabParts Only$399.00or Best Offer+$41.00 deliveryscbr1288 (827) 97%
- Novellus Systems R02-281532-00 RF Match Source Aluminum Coil / WARRANTYOpens in a new window or tabPre-Owned$1,750.00or Best OfferFree deliveryFree returnsTop Rated Plusalameda_auction (3,297) 99.1%
- R27-053666-00 / IONSOURCE MATCHING NETWORK SPD / NOVELLUSOpens in a new window or tabPre-Owned$1,500.67or Best Offer+$40.71 deliverygetspares.com_sparesllc09 (969) 98.4%
- 27-135167-00 / LF GENERATOR, 350KHZ AE 3156024-143 / NOVELLUSOpens in a new window or tabNew – Open box$13,980.00or Best Offer+$102.47 deliverygetspares.com_sparesllc09 (969) 98.4%
- 27-028379-00/ ADVANCED ENERGY 3156024-141 PDX1400 1.4KW LF RF GENERATOR/NOVELLUSOpens in a new window or tabPre-Owned$18,021.03or Best Offer+$487.49 deliverygetspares.com_sparesllc09 (969) 98.4%
- R27-121645-00 / MATCH, TRAZAR, SEQ, IMP COOLING, 27-121645-00, AMU2-1 / NOVELLUSOpens in a new window or tabPre-Owned$9,500.89or Best Offer+$52.21 deliverygetspares.com_sparesllc09 (969) 98.4%
- CLX2750 Comdel FP1341RA RF Generator Module Novellus R27-414821-00 As-IsOpens in a new window or tabParts Only$1,201.25or Best Offer+$113.96 deliveryusedeqsales (9,329) 99.3%
- ADTEC AXR-2000III 2000W RF Plasma Generator Novellus 27-360919-00 Tested WorkingOpens in a new window or tabPre-Owned$2,509.22or Best OfferFree deliveryusedeqsales (9,329) 99.3%
- ADTEC AXR-2000III Plasma Generator Module Novellus 27-307431-00 Working SurplusOpens in a new window or tabPre-Owned$3,604.24or Best OfferFree deliveryusedeqsales (9,329) 99.3%
- ADTEC AXR-2000III Plasma Generator Novellus 27-360919-00 No Key Tested WorkingOpens in a new window or tabPre-Owned$3,108.22or Best OfferFree deliveryusedeqsales (9,329) 99.3%
- Novellus Systems R02-281532-00 RF Match Source Aluminum Coil RefurbishedOpens in a new window or tabRefurbished$2,004.15or Best OfferFree deliveryusedeqsales (9,329) 99.3%
- Novellus 27-189162-00 Regulator, Norgren R07-255-RGEA, 167790Opens in a new window or tabNew – Open box$95.00or Best Offer+$33.29 deliveryfarmoninc (2,340) 100%
- Apex 5513 AE Advanced Energy 3156115-007 RF Generator Novellus 27-284656-00Opens in a new window or tabPre-Owned$6,512.24or Best OfferFree deliveryusedeqsales (9,329) 99.3%
- 27-256558-00R / AE MERCURY 10013 RF MATCH 3150273-004 B WATER COOLED / NOVELLUSOpens in a new window or tabPre-Owned$998.03or Best Offer+$81.81 deliverygetspares.com_sparesllc09 (969) 98.4%
- 27-372675-00 / 10240101 ADTEC AXR-2000III RF PLASMA GENERATOR / NOVELLUS ADTECOpens in a new window or tabPre-Owned$2,699.56or Best Offer+$113.26 deliverygetspares.com_sparesllc09 (969) 98.4%
- 27-257659-00 / GENERATOR CX-10KS LOW FREQUENCY COMDEL CX16P / NOVELLUSOpens in a new window or tabPre-Owned$2,495.00or Best OfferFreightgetspares.com_sparesllc09 (969) 98.4%
- ADTEC AXR-2000III Plasma Generator Novellus 27-360919-00 Exceeds Current As-IsOpens in a new window or tabParts Only$609.22or Best Offer+$102.12 deliveryusedeqsales (9,329) 99.3%
- CLX2750 Comdel FB1341RB RF Generator Novellus 27-414821-00 As-IsOpens in a new window or tabParts Only$1,201.25or Best Offer+$127.52 deliveryusedeqsales (9,329) 99.3%
- ADTEC AXR-2000III RF Plasma Generator Novellus 27-360919-00 Tested RF Trip As-IsOpens in a new window or tabParts Only$609.22or Best Offer+$102.12 deliveryusedeqsales (9,329) 99.3%
- CLX2750 Comdel FP1341RA RF Generator Novellus 27-316462-00 Dented As-IsOpens in a new window or tabParts Only$1,001.25or Best Offer+$113.96 deliveryusedeqsales (9,329) 99.3%
- RFPP 27-032578-00 LF-30 RF Generator, Novellus, 208VAC 50/60HZ 3PH 3000W, 450632Opens in a new window or tabPre-Owned$7,500.00or Best Offer+$302.54 deliveryfarmoninc (2,340) 100%
- GENESIS GHW-50A ENI GHW50A-13DF3L0-006 RF Generator MKS Novellus 27-406204-00Opens in a new window or tabPre-Owned$10,800.75Was: $18,001.2540% offor Best OfferFree deliveryusedeqsales (9,329) 99.3%
- ADTEC Plasma Technology AX-2000EUII-N RF Generator Novellus 27-286651-00 TestedOpens in a new window or tabPre-Owned$1,508.22or Best Offer+$450.00 deliveryusedeqsales (9,329) 99.3%
- Adtec AX-2000EUII RF Plasma Generator, Novellus 27-286651-00, 450623Opens in a new window or tabRefurbished$5,000.00or Best Offer+$245.32 deliveryfarmoninc (2,340) 100%
- Apex 5513 AE Advanced Energy 27-284656-00 RF Generator Novellus Dented As-IsOpens in a new window or tabParts Only$6,011.24or Best OfferFree deliveryusedeqsales (9,329) 99.3%
- ENI MKS DCG-200ZHC-S02 Generator, Slave 20 kW DCG Novellus R27-299485-00, 409667Opens in a new window or tabRefurbished$7,500.00or Best Offer+$276.17 deliveryfarmoninc (2,340) 100%
- Advanced Energy E-wave RF Generator 3152603-011 B Novellus 27-255798-00Opens in a new window or tabPre-Owned$5,398.38or Best Offer+$260.26 deliveryfrom Germanyangr-8424 (235) 98.8%
- Advanced Energy PDX 2500 RF Generator 3156012-101B Novellus 27-047499-00, 117538Opens in a new window or tabPre-Owned$3,500.00or Best Offer+$238.44 deliveryfarmoninc (2,340) 100%
- 1pc for 100% Test TT2301R2-1-NES-NOVELLUS2 / 27-326390-00 .A (by DHL) #A6-40Opens in a new window or tabPre-Owned$1,341.63or Best Offer+$40.90 deliveryfrom Chinajiecanstorea640 (74) 98.6%
- 02-169181-00 / ASSY, RF SOURCE, 27-286643-00 / NOVELLUSOpens in a new window or tabPre-Owned$12,900.82or Best Offer+$116.51 deliverygetspares.com_sparesllc09 (969) 98.4%
- Advanced Energy E-wave RF Generator 3152603-005 Novellus 27-260607-00NOpens in a new window or tabPre-Owned$7,000.00or Best Offer+$900.00 deliveryfrom Irelandrtxparts (54) 100%
- FP6802R5 / RF GENERATOR CX-10K DC 16P LF LOW FREQUENCY / COMDELOpens in a new window or tabPre-Owned$5,950.03or Best OfferFreightgetspares.com_sparesllc09 (969) 98.4%
- ENI DCG-200Z Optima, Novellus R27-299465-00 RF Generator, Slave, 20KW, 450807Opens in a new window or tabPre-Owned$4,500.00or Best Offer+$243.13 deliveryfarmoninc (2,340) 100%
- Novellus 27-257659-00 COMDEL FP1605RA CLX-10K GENERATOR 10kW 4000kHz LFOpens in a new window or tabRefurbished$4,243.95or Best Offer+$117.79 deliverycapitolareatech (8,859) 99.5%
- 3156012-201 / PDX 2500 LF GEN NOVELLUS R27-293721-00 / ADVANCED ENERGYOpens in a new window or tabPre-Owned$9,655.67or Best OfferFreightgetspares.com_sparesllc09 (969) 98.4%
- 27-028379-00 ADVANCED ENERGY 3156024-141 PDX1400 LF RF GENERATOROpens in a new window or tabPre-Owned$16,500.00or Best Offer+$150.00 deliveryfrom Taiwanses29047270 (3) 100%
- Advanced Energy PDXII 3000 RF Generator 3150311-002 Novellus R 27-409833-00 AEOpens in a new window or tabPre-Owned$13,500.00or Best Offer+$158.84 deliverymtnsemi (833) 100%
- 27-278208-00 AE PDX5000, REV B, RF GENERATOR 3156043-206 NOVELLUSOpens in a new window or tabPre-Owned$12,000.00or Best Offer+$300.00 deliveryfrom Taiwanses29047270 (3) 100%
- OEM-25N-01 / OEM-25 XL, HIGH FREQUENCY RF GENERATOR, NOVELLUS 27-00157-00 / ENIOpens in a new window or tabPre-Owned$5,708.03or Best OfferFreightgetspares.com_sparesllc09 (969) 98.4%
- RF Generator ENI PL-2HF-11451-55 P/N 27-00196-00 / Novellus (As - Is)Opens in a new window or tabPre-Owned$1,995.00or Best Offer+$748.24 deliverycora810 (33) 100%
- Kashiyama NeoDry36CU-001B Vacuum Pump NeoDry36C Novellus R27-402502-00 As-IsOpens in a new window or tabParts Only$2,512.24or Best Offer+$400.00 deliveryusedeqsales (9,329) 99.3%
- NOVELLUS 27-326390-00 TEACH PENDANT TT2301R2-1-NES-NOVELLUS2Opens in a new window or tabPre-Owned$1,100.00or Best Offer+$230.00 deliveryfrom South Koreagrandbirdnet (859) 100%
- Novellus R02-341002-00, Ion Source Match NetworkOpens in a new window or tabRefurbished$15,000.00or Best Offer+$136.76 deliveryfarmoninc (2,340) 100%
- Advanced Energy 3152603-012 RF Generator, Novellus 27-260607-00, E'wave, 410727Opens in a new window or tabPre-Owned$9,500.00or Best Offer+$270.11 deliveryfarmoninc (2,340) 100%
- Novellus 27-257659-00 COMDEL FP1605RA CLX-10K GENERATOR 10kW 4000kHz LFOpens in a new window or tabPre-Owned$4,296.00or Best Offer+$300.00 deliveryfrom Taiwanses29047270 (3) 100%
- ADTEC AX-2000EUII-N RF Generator Novellus 27-286651-00 Tested Not Working As-IsOpens in a new window or tabParts Only$608.13or Best Offer+$450.00 deliveryusedeqsales (9,329) 99.3%
- Advanced Energy 3152603-005 RF Generator, Novellus 27-260607-00, E'wave, 405563Opens in a new window or tabRefurbished$14,500.00or Best Offer+$270.11 deliveryfarmoninc (2,340) 100%
- 16297 NOVELLUS TEACH PENDANT TT2301R2-1-NES-NOVELLUS2 27-326390-00Opens in a new window or tabPre-Owned$1,139.03or Best Offer+$136.74 deliveryfrom Singaporej316gallery (1,877) 97.2%
- Advanced Energy 3152603-005 RF Generator, Novellus 27-260607-00, E'wave, 450622Opens in a new window or tabRefurbished$14,500.00or Best Offer+$270.11 deliveryfarmoninc (2,340) 100%
- Adtec AX-3000III RF Plasma Generator, Novellus 27-176875-00, 323069Opens in a new window or tabRefurbished$7,500.00or Best OfferFreightfarmoninc (2,340) 100%
- Comdel CX-16P DC Power Supply, Novellus 27-257659-00, Comdel FP6802R5Opens in a new window or tabPre-Owned$3,599.00Buy It Now+$499.00 deliverytransformer5 (430) 100%
- 27-049867-00 Comdel CLF-5000 5kW RF GENERATOROpens in a new window or tabPre-Owned$19,000.00or Best Offer+$4,500.00 deliveryfrom Taiwanses29047270 (3) 100%
- Adtec AX-3000 III RF Plasma Generator, Novellus 27-176875-00, 13.56Mhz, 329340Opens in a new window or tabRefurbished$7,500.00or Best Offer+$263.19 deliveryfarmoninc (2,340) 100%
- Advanced Energy AE PDX 5000 PDX5000 P/N 27-344118-00 F/R A 3156043-210 AOpens in a new window or tabPre-Owned$11,999.00Buy It NowFreightfrom South Koreagemrkim1109 (348) 100%
- 33356 MKS REMOTE PLASMA SOURCE, R*EVOLUTION, NOVELLUS 27-366349-00 AX7690NOV-01Opens in a new window or tabPre-Owned$15,000.00or Best OfferFreightfrom Singaporej316gallery (1,877) 97.2%
- 1PS TT2301R2-1-NES-NOVELLUS2/27-326390-00 REV.A Free FedEx 90-days WarrantyOpens in a new window or tabPre-Owned$1,215.85or Best OfferFree deliveryfrom Chinanew-trade-inc (658) 100%
- Advanced Energy 3152603-005 RF Generator, Novellus 27-260607-00, E'wave, 405564Opens in a new window or tabNew – Open box$14,500.00or Best Offer+$270.11 deliveryfarmoninc (2,340) 100%
- Comdel FP1339R4 CLX2500 RF Generator, Novellus 27-287258-00, 450627Opens in a new window or tabBrand New$9,500.00or Best Offer+$283.98 deliveryfarmoninc (2,340) 100%
- 1PS TT2301R2-1-NES-NOVELLUS2/27-326390-00 REV.A (3-month warranty/SHIP FedEx)Opens in a new window or tabPre-Owned$1,150.89or Best Offer+$35.00 deliveryfrom Chinape-camera (1,003) 100%
- ADTEC RF Plasma Generator AX-2000 III Novellus 27-307431-00Opens in a new window or tabPre-Owned$4,999.00or Best Offer+$249.00 deliveryfrom Israelkatiil3 (2,267) 100%
